• 专利标题:   Epitaxially growing large area gallium nitride used in field of semiconductor comprises growing graphene two-dimensional material layer on copper (111) single crystal substrate, epitaxially growing gallium nitride film and cooling gallium nitride film to room temperature.
  • 专利号:   CN114613664-A
  • 发明人:   MA Y, YANG J, KONG W
  • 专利权人:   UNIV WESTLAKE
  • 国际专利分类:   C30B025/18, C30B029/40, H01L021/02
  • 专利详细信息:   CN114613664-A 10 Jun 2022 H01L-021/02 202267 Chinese
  • 申请详细信息:   CN114613664-A CN10230279 09 Mar 2022
  • 优先权号:   CN10230279

▎ 摘  要

NOVELTY - Epitaxially growing large area gallium nitride comprises (a) preparing a copper(111) single crystal substrate (1), (b) growing a graphene two-dimensional material layer (2) on the copper(111) single crystal substrate, (c) epitaxially growing a gallium nitride film (3) on the grown grapheme two-dimensional material layer and (d) cooling the gallium nitride film to room temperature to obtain the flat gallium nitride film. USE - The method is useful for epitaxially growing large area gallium nitride used in field of semiconductor. ADVANTAGE - The method produces good quality gallium nitride epitaxial film with low dislocation density and easy peeling. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the gallium nitride product. 1Copper (111) single crystal substrate 2Graphene two-dimensional material layer 3Gallium nitride film