• 专利标题:   Graphene substrate used for semiconductor power module packaging, comprises graphene layer, where surface of graphene layer is covered with insulating layer, and surface of insulating layer is metal circuit topology layer.
  • 专利号:   CN116093064-A
  • 发明人:   ZHAO S, WANG X, LIU L
  • 专利权人:   JIANGSU MACMIC TECHNOLOGY CO LTD
  • 国际专利分类:   H01L023/367, H01L023/498
  • 专利详细信息:   CN116093064-A 09 May 2023 H01L-023/498 202347 Chinese
  • 申请详细信息:   CN116093064-A CN10025281 09 Jan 2023
  • 优先权号:   CN10025281

▎ 摘  要

NOVELTY - Graphene substrate comprises a graphene layer (1), where the surface of the graphene layer is covered with an insulating layer (2), and the surface of the insulating layer is a metal circuit topology layer (3). USE - Graphene substrate used for semiconductor power module packaging. ADVANTAGE - The graphene substrate has excellent graphene-conducting characteristics, greatly improve the radiating effect of the module, and reduces the control difficulty of the module packaging method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the graphene substrate. 1Graphene layer 2Insulating layer 3Metal circuit topology layer