• 专利标题:   Transistor has insulation layer that is arranged on second surface so as to expose portion of second surface, and first region that is positioned between gate insulating film and sauce electrode and second region is located between film and drain electrode.
  • 专利号:   JP2022066654-A
  • 发明人:   MIHASHI F, TATENO Y, ADACHI M, YAMAMOTO Y
  • 专利权人:   SUMITOMO ELECTRIC IND LTD
  • 国际专利分类:   H01L021/336, H01L029/786, H01L051/30
  • 专利详细信息:   JP2022066654-A 02 May 2022 H01L-021/336 202243 Pages: 21 Japanese
  • 申请详细信息:   JP2022066654-A JP175126 19 Oct 2020
  • 优先权号:   JP175126

▎ 摘  要

NOVELTY - The transistor (11) has a gate length direction which is the direction from a source electrode (16) to a drain electrode (17). An insulating base (12) has a first surface (12a). A graphene film (13) is arranged on the first surface. A strip shape extends in a gate width direction perpendicular to the gate length direction. A gate insulating film (14) is arranged on a second surface (13a) of the graphene film. The drain electrode is mounted on a base portion. A gate electrode (15) has a band shape extending in the gate width direction. An insulating layer (21) is arranged on the second surface, so as to expose a portion of the second surface. USE - Transistor e.g. MOSFET. ADVANTAGE - The stable action can be secured and high-frequency characteristics can be improved. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a transistor. Transistor (11) Insulating base (12) First surface (12a) Graphene film (13) Second surface (13a) Gate insulating film (14) Gate electrode (15) Source electrode (16) Drain electrode (17) Insulating layer (21)