• 专利标题:   Graphene embedded polymer micro-electromechanical system cantilever for detecting gas, has cantilever beam to contain piezoresistive layer of graphene nanoplatelets sandwiched between top and bottom encapsulation polymer layers.
  • 专利号:   IN201502507-I4
  • 发明人:   RANGANATHAN C, BETAGERI V, MAHESH R
  • 专利权人:   DAIMLER AG
  • 国际专利分类:   B25F005/00
  • 专利详细信息:   IN201502507-I4 25 Nov 2016 B25F-005/00 201682 Pages: 21 English
  • 申请详细信息:   IN201502507-I4 INCH02507 19 May 2015
  • 优先权号:   INCH02507

▎ 摘  要

NOVELTY - The cantilever (1) has an anchor (2) and a cantilever beam (3) that projects from the anchor. The anchor contains polymer. The cantilever beam consists of a piezoresistive layer (6) of graphene nanoplatelets sandwiched between a top encapsulation polymer layer (7) and a bottom encapsulation polymer layer (8) and contacts in electrical contact with contact pads (4). USE - Graphene embedded polymer micro-electromechanical system (MEMS) cantilever for detection of gas and vapor. Can also be used in engineering field including automotive system, health care or biosensing field, automated manufacturing field, instrumentation field, environmental monitoring and control field, chemical sensing field and consumer products or aerospace field. ADVANTAGE - The cantilever is used to sense any other strain causing effect like biosensing. The fabrication of graphene embedded polymer MEMS cantilever is easier. The cost for fabrication of graphene embedded polymer MEMS cantilever is reduced. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a microcantilever; and (2) a method for fabricating graphene embedded polymer micro-electromechanical system (MEMS) cantilever for detection of gas and vapor. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the microcantilever. Graphene embedded polymer MEMS cantilever (1) Anchor (2) Cantilever beam (3) Contact pad (4) Piezoresistive layer (6) Encapsulation polymer layers (7,8)