• 专利标题:   Three-dimensional anisotropic pressure sensor includes soluble truss, that uses the soluble photosensitive resin light-curing additive manufacturing prototype as a template.
  • 专利号:   CN112848269-A, CN112848269-B
  • 发明人:   CHEN X, WANG C, SHAO J, TIAN H, SONG Q, NIU W, WANG S
  • 专利权人:   UNIV XIAN JIAOTONG
  • 国际专利分类:   B29C064/10, B33Y070/10, B33Y080/00, G01L005/162
  • 专利详细信息:   CN112848269-A 28 May 2021 B29C-064/10 202155 Pages: 12 Chinese
  • 申请详细信息:   CN112848269-A CN11642025 31 Dec 2020
  • 优先权号:   CN11642025

▎ 摘  要

NOVELTY - Three-dimensional (3D) anisotropic pressure sensor includes soluble truss, that uses the soluble photosensitive resin light-curing additive manufacturing prototype as a template, the surface is wrapped with a metal film and growing a graphene elastic layer is grown, and after melting, obtaining a graphene/copper hollow composite rod with a hollow structure. A flexible substrate (15)/multi-layer triboelectric sensing layer is provided on the outer surface of the hollow composite support rod in two pairs. The triboelectric signal is used as the sensing principle. The two independent signal-transmitting electrodes are set on each surface, and the two pairs of orthogonal direction sensing signals are independent of each other. The upper and lower outer surfaces of the hollow composite strut with a larger area are the composite piezoresistive structure A of B flexible substrate (17)/electrode (16)/adhesive layer/hollow composite strut. USE - Three-dimensional pressure sensor based on three dimensional (3-D) printing template. ADVANTAGE - The sensor is simple to manufacture and inexpensive, and has high working efficiency, and can realize sensing and identification of a three-dimensional pressure signal on basis of coating sensing. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing a three-dimensional pressure sensor based on a 3D printing template, which involves: (A) mixing photoinitiator bisacyl phosphorus oxide, the reactive monomer N, N-dimethylacrylamide, the comonomer methacrylic acid, cleavage agent methacrylic anhydride and the filler polyvinylpyrrolidone according to a certain ratio and dispersing uniformly to obtain a soluble photosensitive resin; (B) adjusting the ultra-high-precision light curing molding equipment to the working state, and pouring the soluble photosensitive resin into the resin tank along the wall of the cup; (C) immersing the light-curing work surface completely into the liquid surface of the photosensitive resin; (D) generating by the computer, transmitting from the data bus to the ultraviolet light generator to output the light spot image of the corresponding slice, and at the same time control the lifting and moving of the light curing workbench; (E) using the ultraviolet light generator to control the resin between the light curing workbench and the leveling film by layered curing, and completing the preparation process of the soluble truss according to the instructions of the computer; (F) removing soluble truss from the light curing workbench, cleaning and drying, and then placing in a copper film evaporation apparatus, and after 1 minute, obtaining a copper/resin composite material coated with a copper film; (G) preoaring an alkaline aqueous solution, put the truss into the alkaline aqueous solution for etching reaction, dissolve the resin to obtain a hollow pole structure, and obtaining reduced graphene oxide/copper hollow composite pole after washing and drying; (H) vapor-depositing the layer of metal on the B flexible substrate as an electrode, and wires are respectively drawn from the electrode and the upper surface of the truss; (I) immersing hollow truss in polydimethylsiloxane (PDMS) and curing in an oven at about 80 degrees C; (J) cooling to room temperature, a composite piezoresistive structure A of flexible substrate/electrode/adhesive layer/hollow composite strut is obtained; (K) using multi-layer graphene as an electrode on the A flexible substrate by chemical vapor deposition or wet transfer of graphene; (L) using triboelectric material as the substrate, and obtaining the other electrode of the triboelectric sensing layer by setting multilayer graphene on the triboelectric material; (M) spin-coating a layer of polydimethylsiloxane on the electrode to obtain a triboelectric sensing layer; and (N) adhering two pairs of smaller surfaces in the composite piezoresistive structure A to the triboelectric sensing layer, and forming piezoresistive/triboelectric composite pressure sensing structure with a sensing surface B and a sensing surface C, solidifying and cooling to obtain an anisotropic pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional view of the sensor. Triboelectric sensing layer (11) Electrodes (12,14) Flexible substrate (15) Electrode (16) B flexible substrate (17)