▎ 摘 要
NOVELTY - Graphene coolant comprises ethylene glycol, cellulose ether, alcohol amine, modified graphene, rust inhibitors, bacteriostatic agents, antifoaming agent, stabilizing agent, chelating agent and de-ionized water. USE - The graphene coolant is useful for processing monocrystalline silicon, polysilicon, silicon wafer, quartz, indium gallium nitride, gallium arsenide and germanium (claimed).