• 专利标题:   Graphene wiring has interlayer cross-linked layer which includes cross-linked molecular structure including multiple bonded molecules cross-linking graphene sheets included in multilayer graphene.
  • 专利号:   US2016086891-A1, JP2016063096-A, US9761530-B2
  • 发明人:   MIYAZAKI H, SAKAI T, YAMAZAKI Y, KATAGIRI M
  • 专利权人:   TOSHIBA KK, TOSHIBA KK
  • 国际专利分类:   H01L021/3205, H01L023/528, H01L023/532, C01B031/02, H01L021/28, H01L021/768, H01L023/48
  • 专利详细信息:   US2016086891-A1 24 Mar 2016 H01L-023/532 201624 Pages: 14 English
  • 申请详细信息:   US2016086891-A1 US842249 01 Sep 2015
  • 优先权号:   JP190566

▎ 摘  要

NOVELTY - The graphene wiring (100) has a graphene intercalation compound including a multilayer graphene (1) having graphene sheets and an interlayer substance (2) arranged between layers of the multilayer grapheme. An interlayer cross-linked layer is connected to a side surface of the multilayer grapheme. The interlayer cross-linked layer has a cross-linked molecular structure including multiple bonded molecules cross-linking the graphene sheets included in the multilayer graphene. USE - Graphene wiring. ADVANTAGE - The side surface of the multilayer graphene in a longitudinal direction can be protected using a mask for thin line. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing graphene wiring. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of graphene wiring. Multilayer graphene (1) Interlayer substance (2) Graphene intercalation compound (10) Layer (20) Graphene wirings (100)