• 专利标题:   Silicon-based graphene nanoconvex structure comprises substrate comprising single crystal silicon lower layer and silicon dioxide upper layer with granular protrusions, and graphene covered on substrate.
  • 专利号:   CN110482486-A, CN110482486-B
  • 发明人:   FAN N, PENG B, GUO J, LIU C, WANG Q
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   B82B001/00, B82B003/00, B82Y030/00, B82Y040/00, C01B032/186
  • 专利详细信息:   CN110482486-A 22 Nov 2019 B82B-003/00 201999 Pages: 14 Chinese
  • 申请详细信息:   CN110482486-A CN10634615 15 Jul 2019
  • 优先权号:   CN10634615

▎ 摘  要

NOVELTY - A silicon-based graphene nanoconvex structure comprises substrate with granular protrusions, and graphene covered on the substrate. The substrate comprises single crystal silicon on lower layer of substrate and silicon dioxide on upper layer of substrate. USE - Silicon-based graphene nanoconvex structure. ADVANTAGE - The silicon-based graphene nanoconvex structure is prepared with reduced adhesion and friction process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for preparation of silicon-based graphene nanoconvex structure, which involves (1) adding substrate to acetone or deionized water, ultrasonically cleaning, etching trench array on the substrate, obtaining substrate material, (2) preparing graphene thin film through chemical vapor deposition, (3) adhering the graphene film obtained in step (2) with adhesive tape, placing into an etching solution for etching away the metal material used to prepare the graphene film, cleaning with deionized water, attaching the graphene film on the tape to the grooved side of the substrate obtained in step (1), leaving still at normal temperature, removing the tape in a direction perpendicular to the groove, (4) using silicon probe for frictionally pressing down the graphene film which is located on the substrate groove, selecting silicon probe with elastic coefficient of 40-60 N/m, normal load of 100-500 nN, and friction frequency of 1-4 Hz for rubbing graphene film supported by a substrate in a non-groove region.