• 专利标题:   Graphene/silicon structure solar cell manufacturing method, involves locating bottom electrode on lower surface of n-type silicon layer, and introducing oxide layer at Schottky junction interface to modify Schottky junction interface.
  • 专利号:   CN109037392-A
  • 发明人:   SHAN D, ZHOU S, CHEN X
  • 专利权人:   JIANGSU HUAFU HIGH TECHNOLOGY ENERGY STO, YANGZHOU POLYTECHNIC INST
  • 国际专利分类:   H01L031/18
  • 专利详细信息:   CN109037392-A 18 Dec 2018 H01L-031/18 201910 Pages: 6 Chinese
  • 申请详细信息:   CN109037392-A CN10569778 05 Jun 2018
  • 优先权号:   CN10569778

▎ 摘  要

NOVELTY - The method involves performing plasma-enhanced vapor deposition (PECVD) on upper surface of n-type silicon layer. A graphene layer is covered on an n-type silicon surface window. Amorphous silicon/amorphous silicon carbide multilayer film structure is formed with a graphene layer. Laser induced crystallization process is performed to form a laminated silicon quantum point multi-layer film and a heterojunction structure with a graphene layer. Gallium alloy film preparing process is performed. A bottom electrode is located on a lower surface of n-type silicon layer. An oxide layer is introduced at a graphene/silicon Schottky junction interface to modify the graphene/silicon Schottky junction interface. USE - Graphene/silicon structure solar cell manufacturing method. ADVANTAGE - The method enables forming a p type lamination silicon quantum dot/graphene/silicon dioxide/n-type silicon structure so as to effectively improve photoelectric conversion efficiency of a solar cell.