▎ 摘　　要

NOVELTY - Achieving non-contact rapid infiltration of nanopores using ultrasonic waves comprises choosing piezoelectric transducer as ultrasonic sound source, and cracking nano-scale bubbles in nanopores by using high-frequency ultrasound with frequency ≥1 M, and realizing infiltration of nanopores of different sizes and different film types. The nanoporous film comprises silicon nitride, silicon, zinc oxide, aluminum nitride, indium tin oxide, silicon oxide, graphene, molybdenum disulfide or boron nitride. The piezoelectric transducer material includes PZT, quartz, PMN-PT, lithium niobate, lithium tantalate or zinc oxide. The material of solution pool is polytetrafluoroethylene, PMMA or many metals. The material of reference electrode is silver silver chloride electrode, platinum electrode or gold electrode. USE - The method is useful for achieving non-contact rapid infiltration of nanopores using ultrasonic waves. ADVANTAGE - The method: is suitable for application scenarios of nanopores with different diameters and different types of thin film materials (silicon nitride, zinc oxide, aluminum oxide), and can achieve an increase in wetting speed of more than two orders of magnitude; has simple operation and high speed, which can used for batch infiltration treatment of nanopore sensors; can use to design integrated small equipment for on-site, real-time and mobile infiltration treatment.