• 专利标题:   Formation of transistor structure involves forming graphene layer on insulating layer, forming stack of primary and secondary metal portions, and laterally offsetting sidewalls of primary metal portion relative to secondary portion.
  • 专利号:   US2012329260-A1, US8753965-B2
  • 发明人:   AVOURIS P, FARMER D B, LIN Y, ZHU Y
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82Y040/00, H01L021/336, H01L021/3205
  • 专利详细信息:   US2012329260-A1 27 Dec 2012 H01L-021/336 201303 Pages: 15 English
  • 申请详细信息:   US2012329260-A1 US602117 01 Sep 2012
  • 优先权号:   US876454, US602117

▎ 摘  要

NOVELTY - A graphene layer (20) is formed on an insulating layer (12), and a stack of primary and secondary metal portions are formed on graphene layer. The sidewalls of primary metal portion are vertically coincident with sidewalls of secondary metal portion. The sidewalls of primary metal portion are subjected to laterally offsetting relative to sidewalls of secondary metal portion by a lateral distance, and transistor structure is formed. USE - Formation of transistor structure. ADVANTAGE - The transistor structure having favorable dimensional stability and performance is formed. DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional view of structure after deposition of blanket gate dielectric layer. Substrate (8) Substrate layer (10) Insulating layer (12) Graphene layer (20) Dielectric seed layer (30)