▎ 摘　　要

NOVELTY - An epitaxial structure comprises a substrate (100) having a patterned epitaxial growth surface defining grooves (103); a graphene layer (110) covering the patterned epitaxial growth surface; and an epitaxial layer on the patterned epitaxial growth surface, where a first part of the graphene layer is sandwiched between the substrate and the epitaxial layer, and a second part of the graphene layer is embedded into the epitaxial layer. USE - As an epitaxial structure (claimed). ADVANTAGE - The substrate is a patterned structure having grooves in micrometer scale, thus reduces the dislocation during the growth. The graphene layer is a patterned structure, the thickness and the aperture is in nanometer scale, thus the dislocation is further reduced and the quality of the epitaxial layer is improved. Due to the existence of the graphene layer, the contact surface between the epitaxial layer and the substrate is reduced, and the stress between them is reduced, thus the substrate is used to grow a relatively thicker epitaxial layer. The graphene layer is a freestanding structure, thus it can be directly placed on the substrate, and the method is simple and low in cost. The epitaxial layer grown on the substrate has relatively less dislocation, so it can be used to produce electronics in higher performance. DESCRIPTION OF DRAWING(S) - The figure shows a schematic view of sub graphene layers spaced from each other. Substrate (100) Grooves (103) Graphene layer (110) Apertures (112)