• 专利标题:   Method for providing temporary layer on graphene sheet, involves depositing metal layer to first surface of graphene sheet and removing metal layer.
  • 专利号:   US2017365477-A1, WO2017218835-A1, CN109313188-A, KR2019021325-A, EP3472619-A1
  • 发明人:   PAN D, GOLDSMITH B
  • 专利权人:   NANOMEDICAL DIAGNOSTICS INC, NANOMEDICAL DIAGNOSTICS INC, NANOMEDICAL DIAGNOSTICS INC
  • 国际专利分类:   H01L021/02, H01L021/285, G01N027/414, G01N033/543, H01L021/28, H01L029/16
  • 专利详细信息:   US2017365477-A1 21 Dec 2017 H01L-021/285 201803 Pages: 7 English
  • 申请详细信息:   US2017365477-A1 US623295 14 Jun 2017
  • 优先权号:   US350627P, US359153P, US623295, CN80037216

▎ 摘  要

NOVELTY - The method involves transferring a graphene sheet (215) to a selected wafer (205). A metal layer (220) is deposited to a first surface of the graphene sheet and the metal layer is removed. An electron beam evaporation process is applied. The graphene sheet is dipped in a gold plating solution. The graphene sheet is washed with deionized water to remove any remaining particles from the metal layer. The metal comprises gold, ruthenium, rhodium, palladium, silver, osmium, iridium, or platinum. USE - Method for providing temporary layer on graphene sheet for biosensor and electronic applications using lithographic patterning techniques. ADVANTAGE - The graphene is allowed to be handled in a factory setting for large manufacturing production. The metal layer help to protect the graphene from being contaminated or degraded, even as the graphene is prepped and assembled for use within select graphene based devices due to inert nature of the metal layer. DESCRIPTION OF DRAWING(S) - The drawings show schematic view of a graphene sheet transferred onto a substrate and a graphene sheet with a metal layer. Wafer (205) Graphene sheet (215) Metal layer (220)