▎ 摘 要
NOVELTY - Method of monitoring (200) defect formation or healing involves exposing (204) a surface of a material to incident radiation, detecting (206) scattered radiation from a portion of the material exposed to the incident radiation, and generating (208) data indicative of defect formation or healing. The data indicative of defect formation or healing provides a rate of defect formation or healing, a temporal change in the rate of defect formation or healing and size of the defects, a spatial change in the rate of defect formation or healing and/or a spatial change in the size of the defects. USE - Method of monitoring defect formation or healing in graphene film (claimed). Uses include but are not limited to special barrier layers, coatings, reflection factor radiators, antennas, integrated circuits, transparent electrodes, solar cells, gas barriers, and flexible electronics. ADVANTAGE - The method effectively monitors defect formation or healing and provides real-time feedback. DETAILED DESCRIPTION - Method of monitoring defect formation or healing involves exposing a surface of a material to incident radiation, detecting scattered, emitted and/or transmitted radiation from at least a portion of the material exposed to the incident radiation, and generating data indicative of defect formation or healing. The method is performed in situ and the data indicative of defect formation or healing provides a rate of defect formation or healing, a temporal change in the rate of defect formation or healing, a temporal change in the size of the defects, a spatial change in the rate of defect formation or healing and/or a spatial change in the size of the defects. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart of the method of monitoring defect formation or healing. Monitoring of defect formation or healing (200) Provision of material (202) Exposure of surface to incident radiation (204) Detection of scattered, emitted and/or transmitted radiation or particles (206) Generation of data indicative of defect formation or healing (208)