• 专利标题:   Preparing controlled growth of graphene layers using organometallic compounds comprises cleaning the copper substrate, placing in chemical vapor deposition tube furnace chamber, passing protective gas, heating, and rapidly cooling.
  • 专利号:   CN104030282-A, CN104030282-B
  • 发明人:   LIAO W, JIN L, JIANG J
  • 专利权人:   WUXI GEFEI ELECTRONIC THIN FILMS TECHNOL
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   CN104030282-A 10 Sep 2014 C01B-031/04 201480 Pages: 7 Chinese
  • 申请详细信息:   CN104030282-A CN10292560 25 Jun 2014
  • 优先权号:   CN10292560

▎ 摘  要

NOVELTY - Preparing controlled growth of graphene layers using organometallic compounds comprises (i) cleaning the copper substrate with acetone, ethanol and deionized water, and then drying; (ii) placing the treated copper substrate in chemical vapor deposition (CVD) tube furnace chamber, passing protective gas, heating, annealing, so as grow copper crystal grains; (iii) heating to growth temperature, passing carrier gas and vapors of volatile organometallic compounds, so as to grow graphene; (iv) cooling copper substrate; and (v) lowering the copper substrate temperature, and taking out the graphene. USE - The method is useful for preparing controlled growth of graphene layers using organometallic compounds (claimed). ADVANTAGE - The method realizes controlled preparation of at least two layers and uniform graphene on the copper substrate. DETAILED DESCRIPTION - Preparing controlled growth of graphene layers using organometallic compounds comprises (i) cleaning the copper substrate respectively with acetone, ethanol and deionized water, for 5-30 minutes, and then drying the substrate with nitrogen having purity of 99.999%; (ii) placing the treated copper substrate in chemical vapor deposition (CVD) tube furnace chamber, passing protective gas, heating to annealing temperature, thermally annealing, so as grow copper crystal grains; (iii) heating to growth temperature, passing carrier gas and vapors of volatile organometallic compounds, so as to grow graphene; (iv) rapidly cooling the copper substrate, and extracting the residual gas from the CVD tube furnace; and (v) lowering the copper substrate temperature to room temperature, and taking out the prepared graphene.