• 专利标题:   Graphene growth device includes graphene deposition system, deposition furnace, vehicle, inner quartz tube, horizontal slide rail, heating system, vehicle body, furnace body, graphite mold, graphite alkenyl bottom, and opening end.
  • 专利号:   CN103449428-A, CN103449428-B
  • 发明人:   JIN H, LIU Z, ZHOU Z, PENG P
  • 专利权人:   CHANGZHOU ERWEI CARBON TECHNOLOGY CO LTD, CHANGZHOU 2D CARBON GRAPHENE MATERIAL CO
  • 国际专利分类:   C01B031/04, C23C016/26
  • 专利详细信息:   CN103449428-A 18 Dec 2013 C01B-031/04 201414 Pages: 9 Chinese
  • 申请详细信息:   CN103449428-A CN10409177 10 Sep 2013
  • 优先权号:   CN10409177

▎ 摘  要

NOVELTY - A graphene growth device comprises graphene deposition system, deposition furnace, vehicle, inner quartz tube, (1), horizontal slide rail (10), heating system (4), vehicle body (5), and furnace body (3). The device further comprises graphite mold, graphite alkenyl bottom, opening end, sealed flange, air inlet, furnace opening, clamping device, wheel, horizontal elevating platform, and horizontal clamping device. USE - Graphene growth device. ADVANTAGE - The device saves time and energy and improves working efficiency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for growing of graphene using the device comprising heating furnace to 950-1000 degrees C, introducing mold and substrate in quartz pipe, sealing quartz pipe, introducing into deposition furnace, pumping pressure at less than 5-10 Pa, raising temperature, introducing argon gas to protect graphite alkenyl bottom, depositing graphite for 10-20 minutes, introducing methane and hydrogen gas, pumping residual gas, and cooling. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of graphene growth device. Inner quartz tube (1) Furnace body (3) Heating system (4) Vehicle body (5) Horizontal slide rail (10)