• 专利标题:   Graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor for detecting nitrous oxide, is obtained by heat oxidizing silicon dioxide layer on surface of single crystal silicon.
  • 专利号:   CN104849324-A, CN104849324-B
  • 发明人:   LIU S, ZHANG Y, ZHNG T, WANG Z
  • 专利权人:   UNIV JILIN
  • 国际专利分类:   G01N027/04
  • 专利详细信息:   CN104849324-A 19 Aug 2015 G01N-027/04 201578 Pages: 12 Chinese
  • 申请详细信息:   CN104849324-A CN10272072 25 May 2015
  • 优先权号:   CN10272072

▎ 摘  要

NOVELTY - A graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor is obtained by taking single-crystal silicon as substrate, heat oxidizing a silicon dioxide layer on the surface of the single crystal silicon, depositing 3-5 silicon dioxide layers on the surface of interdigital gold electrode. The surface of silicon dioxide layer and interdigital gold electrode is coated with graphene/multi-walled carbon nanotubes/zinc oxide ternary composite thin film. USE - Graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor for detecting nitrous oxide (claimed). ADVANTAGE - The sensor has high sensitivity, gas-sensitive response characteristics at room temperature, high response sensitivity, high response recovery rate and high response reversibility at room temperature. DETAILED DESCRIPTION - A graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor is obtained by taking single-crystal silicon as substrate, heat oxidizing a silicon dioxide layer on the surface of the single crystal silicon, depositing 3-5 silicon dioxide layers on the surface of interdigital gold electrode. The surface of silicon dioxide layer and interdigital gold electrode is coated with graphene/multi-walled carbon nanotubes/zinc oxide ternary composite thin film, where the mass ratio of the ternary composite material, multi-wall carbon nano tube, and zinc oxide at a ratio of 1:0.4-20:18-900. An INDEPENDENT CLAIM is also included for a method for preparing a graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor.