▎ 摘 要
NOVELTY - A graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor is obtained by taking single-crystal silicon as substrate, heat oxidizing a silicon dioxide layer on the surface of the single crystal silicon, depositing 3-5 silicon dioxide layers on the surface of interdigital gold electrode. The surface of silicon dioxide layer and interdigital gold electrode is coated with graphene/multi-walled carbon nanotubes/zinc oxide ternary composite thin film. USE - Graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor for detecting nitrous oxide (claimed). ADVANTAGE - The sensor has high sensitivity, gas-sensitive response characteristics at room temperature, high response sensitivity, high response recovery rate and high response reversibility at room temperature. DETAILED DESCRIPTION - A graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor is obtained by taking single-crystal silicon as substrate, heat oxidizing a silicon dioxide layer on the surface of the single crystal silicon, depositing 3-5 silicon dioxide layers on the surface of interdigital gold electrode. The surface of silicon dioxide layer and interdigital gold electrode is coated with graphene/multi-walled carbon nanotubes/zinc oxide ternary composite thin film, where the mass ratio of the ternary composite material, multi-wall carbon nano tube, and zinc oxide at a ratio of 1:0.4-20:18-900. An INDEPENDENT CLAIM is also included for a method for preparing a graphene/multi-walled carbon nano tube/zinc oxide composite material-based-based resistance-type gas sensor.