• 专利标题:   Semiconductor device comprises conductive contact set in first insulation layer, and second insulation layer set on first insulation layer and including contact hole that exposes top surface of conductive contact.
  • 专利号:   US2021225636-A1, US11682555-B2
  • 发明人:   JUNG H, LEE J, PARK J
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/285, H01L049/02, H01L021/768, C23C016/04, H01L021/02
  • 专利详细信息:   US2021225636-A1 22 Jul 2021 H01L-021/02 202165 English
  • 申请详细信息:   US2021225636-A1 US224365 07 Apr 2021
  • 优先权号:   KR118139

▎ 摘  要

NOVELTY - Semiconductor device comprises substrate 110. The first insulation layer is set on substrate. The conductive contact is set in first insulation layer. The second insulation layer is set on first insulation layer and including contact hole that exposes top surface of conductive contact. The lower electrode is set above substrate and cylinder-shaped with filled interior. The lower electrode extends in contact hole of second insulation layer and contacting top surface of conductive contact. The dielectric layer is set on lower electrode and including first portion that is set on upper portion of lower electrode and second portion that is set on lower portion of lower electrode. The first upper electrode is set on first portion of dielectric layer, and including body portion and end portion. The second upper electrode is set on first upper electrode and on second portion of dielectric layer. The second upper electrode includes first portion that is set on first upper electrode. USE - Semiconductor device. ADVANTAGE - The semiconductor device improves step coverage. DESCRIPTION OF DRAWING(S) - The drawing shows schematic view of semiconductor device. Substrate (110) 3-dimensional structure (140) Adsorption control layer (160) Material layer (170)