▎ 摘 要
NOVELTY - The device has a copper foil (1) whose ends are wound on an unreeling drum (5) and a winding drum (6) respectively. The copper foil is provided with four air curtain generating pipes (8) capable of generating an air curtain (7). The air curtain generated by the air curtain generation pipes divides a technical cabin (4) into a primary reaction area (9), a secondary reaction area and a third reaction area. The three reaction areas are provided with a heater (12). A top unit is connected with a gas inlet pipe (13). An end of an exhaust pipe (14) is fixed with a vacuum pump (16). Ends of the copper foil and the reeling cabin are wound around the winding drum. USE - Segmented roll-to-roll chemical vapor deposition (CVD) graphene continuous growth device for use in a graphene material field of graphene material. ADVANTAGE - The device improves growth quality of the roll-to-roll graphene, and finishes growth of large area single crystal graphene. The gas inlet pipe of the air outlet and the uniform gas plate communicate the discharged gas can be uniformly distributed in the corresponding partition. The vacuum corrugated pipe has large flexibility and high anti-fatigue performance. The three partitions not only can independently adjust the atmosphere temperature, but also can access different requirements of process gas, compared with the existing device, and realizes the segmented growth. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of the sectional roll-to-roll CVD graphene continuous growth device. 1Copper foil 2Unreeling cabin 3Rolling cabin 4Technical cabin 5Placing wound roll 6Winding drum 7Air curtain 8Air curtain generating tube 9Primary reaction area 10Secondary reaction area 11Tertiary reaction area 12Heater 13Gas inlet pipe 14Exhaust pipe 15Pressure adjusting valve 16Vacuum pump 17Tension wheel 18Auxiliary heater 19Fixing bracket 20Infrared thermometer 21Uniform air plate 22Vacuum pressure gage