▎ 摘 要
NOVELTY - The modulator has a first graphene nano-belt layer (1) and a second graphene nano-belt layer (2) for integrating multi-mode ridge- shaped waveguide (4). A first electrode pair (5) is connected with the first graphene nano-belt layer. A second electrode pair (6) is connected with the second graphene nano-belt layer. A third electrode pair (7) is connected with multi- mode ridge-shaped waveguide to provide a back gate voltage for graphene. An insulating layer (8) and a substrate layer (9) are set below multi-mode ridge-shaped waveguide in turn, where the material of multi-mode ridge-shaped waveguide is made of silicon, germanium, a silicon-germanium mixture, Indium phosphide or Gallium arsenide. USE - Graphene based waveguide integrated multi-mode electro-optic modulator. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene based waveguide integrated multi-mode electro-optic manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a graphene based waveguide integrated multi-mode electro-optic modulator. Graphene nano-belt layers (1,2) Multi-mode ridge- shaped waveguide (4) Electrode pairs (5,6,7) Insulating layer (8) Substrate layer (9)