• 专利标题:   Graphene based waveguide integrated multi-mode electro-optic modulator, has first electrode pair connected with first graphene nano-belt layer, and insulating layer and substrate layer set below multi-mode ridge-shaped waveguide in turn.
  • 专利号:   CN110221385-A, CN110221385-B
  • 发明人:   CHENG Z, XING Z, HAN Y, HU H, LIU T
  • 专利权人:   UNIV TIANJIN
  • 国际专利分类:   G02B006/12, G02B006/13
  • 专利详细信息:   CN110221385-A 10 Sep 2019 G02B-006/12 201977 Pages: 11 Chinese
  • 申请详细信息:   CN110221385-A CN10413746 17 May 2019
  • 优先权号:   CN10413746

▎ 摘  要

NOVELTY - The modulator has a first graphene nano-belt layer (1) and a second graphene nano-belt layer (2) for integrating multi-mode ridge- shaped waveguide (4). A first electrode pair (5) is connected with the first graphene nano-belt layer. A second electrode pair (6) is connected with the second graphene nano-belt layer. A third electrode pair (7) is connected with multi- mode ridge-shaped waveguide to provide a back gate voltage for graphene. An insulating layer (8) and a substrate layer (9) are set below multi-mode ridge-shaped waveguide in turn, where the material of multi-mode ridge-shaped waveguide is made of silicon, germanium, a silicon-germanium mixture, Indium phosphide or Gallium arsenide. USE - Graphene based waveguide integrated multi-mode electro-optic modulator. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene based waveguide integrated multi-mode electro-optic manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a graphene based waveguide integrated multi-mode electro-optic modulator. Graphene nano-belt layers (1,2) Multi-mode ridge- shaped waveguide (4) Electrode pairs (5,6,7) Insulating layer (8) Substrate layer (9)