• 专利标题:   Substrate for electronic device, such as a field-effect transistor, includes graphene film having atomic arrangement oriented in relation to atomic arrangement of material forming the surface layer region of support substrate.
  • 专利号:   US2017263453-A1, JP2017165642-A, US10083831-B2
  • 发明人:   OKADA M, MITSUHASHI F, TATENO Y, UENO M, MIHASHI F
  • 专利权人:   SUMITOMO ELECTRIC IND LTD, SUMITOMO ELECTRIC IND LTD, SUMITOMO ELECTRIC IND LTD
  • 国际专利分类:   H01L021/02, H01L029/04, H01L029/16, H01L029/786, C01B032/15, C01B032/18, C01B032/182, H01L021/336, H01L051/05, H01L051/30
  • 专利详细信息:   US2017263453-A1 14 Sep 2017 H01L-021/02 201765 Pages: 18 English
  • 申请详细信息:   US2017263453-A1 US454327 09 Mar 2017
  • 优先权号:   JP046988, JP234450

▎ 摘  要

NOVELTY - The substrate (1) includes a support substrate (2) having a first main surface (2A) and a surface layer region which includes at least the first main surface and is formed of any one material selected from the group consisting of boron nitride, molybdenum disulfide, tungsten disulfide, niobium disulfide, and aluminum nitride. A graphene film (3) is disposed on the first main surface and having an atomic arrangement oriented in relation to an atomic arrangement of the material forming the surface layer region. USE - Substrate for electronic device (claimed), such as a field-effect transistor. ADVANTAGE - The substrate enables a high mobility to be stably ensured in the electronic device manufactured to include the graphene film forming an electrically conductive portion. The switching speed of an electronic device manufactured with the substrate can be increased. The efficiency of manufacture of an electronic device in which the substrate is used can be increased. DESCRIPTION OF DRAWING(S) - The drawing is a schematic cross-sectional view for illustrating the method for manufacturing a field effect transistor including a graphene film. Substrate (1) Support substrate (2) First main surface (2A) Graphene film (3) Source electrode (4)