▎ 摘　　要

NOVELTY - The method involves forming an oxide layer by an atomic layer deposition process on a metal substrate having a graphene layer synthesized on a surface, and checking a defect of graphene by heating the metal substrate. USE - Method for performing optical inspection for graphene using atomic layer deposition. ADVANTAGE - The method enables to performing optical inspection for graphene using atomic layer deposition, which effectively evaluates graphene defects and non-uniform number of layers. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for performing graphene nondestructive testing, which involves (A) forming an oxide layer on a metal substrate having a graphene layer synthesized on the surface by an atomic layer deposition process, removing the graphene layer, the multilayer graphene on which the oxide layer is not formed; and (B) visualizing the multilayered graphene removal region from which the multilayered graphene has been removed. DESCRIPTION OF DRAWING(S) - The drawing shows schematic view for a method performing optical inspection for graphene using atomic layer deposition.