• 专利标题:   Mechanism for moving substrate carrier through chemical vapor deposition system, has moveable arm for operating in chamber including first pressure and temperature, and motor located outside chamber in environment including second pressure.
  • 专利号:   WO2022243891-A1, DE102022204967-A1, US2022372621-A1
  • 发明人:   NAVEH D, STERN C, BENNAIM Y, ISMACH A, KAUFMAN T, BARRABI E, MENTOVICH E, ROTEM Y, GRIDISH Y
  • 专利权人:   MELLANOX TECHNOLOGIES LTD, UNIV BARILAN, UNIV TEL AVIV, SIMTAL NANOCOATINGS LTD, UNIV RAMOT AT TEL AVIV LTD, SIMTAL NANOCOATINGS LTD, UNIV RAMOT AT TEL AVIV LTD, UNIV BARILAN, MELLANOX TECHNOLOGIES LTD
  • 国际专利分类:   C23C016/00, H01L021/677, C23C014/50, H01L021/67, C23C016/458
  • 专利详细信息:   WO2022243891-A1 24 Nov 2022 H01L-021/677 202297 Pages: 47 English
  • 申请详细信息:   WO2022243891-A1 WOIB054614 18 May 2022
  • 优先权号:   US201910P, US305206

▎ 摘  要

NOVELTY - Mechanism comprises a moveable arm; and a motor (307) configured to actuate the movable arm. The moveable arms comprise an actuating member (304) connected to the motor and configured to move the movably arm between a retracted state and an extended state. The movable arms are configured to operate in a chamber having a first pressure and a first temperature. The motor is located outside the chamber in an environment having a second pressure. The first temperature is set such that graphene deposition can be performed on a substrate. The moveable arm comprises at least one of stainless steel alloy, titanium alloy and bronze. The cylindrical housing may comprise at least one of quartz and graphite. The first coating may comprise at least one of graphite, carbon, tungsten nitride, molybdenum nitride, tantalum nitride, titanium nitride, silicon nitride, and/or silicon carbide. USE - The mechanism is useful for moving a substrate carrier through a chemical vapor deposition system (claimed) for depositing a thin film of a desired material onto a substrate for technical applications. ADVANTAGE - The mechanism: allows the substrate carrier to be moved through the chemical vapor deposition system in an efficient and effective manner; ensures that the first temperature is set so that graphene deposition can be performed on a substrate in the system in a reliable manner; serves to reduce the amount of floor space taken up by the chemical vapor deposition system; and is cost-effective. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a substrate carrier for moving many substrates through a chemical vapor deposition system. DESCRIPTION OF DRAWING(S) - The figure shows a front view of a fixed end. 304Actuating member 306First support beam 307Motor 310First support rod 312Second support rod