• 专利标题:   Capacitive-based graphene sensor system, has dielectric layer that is arranged over electrodes from which graphene layer is electrically isolated.
  • 专利号:   US8981346-B1
  • 发明人:   KAMIN N, DE ANDRADE M, GARMIRE D, ORDONEZ R, HAYASHI C
  • 专利权人:   US SEC OF NAVY
  • 国际专利分类:   H01L027/144, H01L029/06, H01L031/0336, H01L031/115
  • 专利详细信息:   US8981346-B1 17 Mar 2015 H01L-029/06 201526 Pages: 11 English
  • 申请详细信息:   US8981346-B1 US501833 30 Sep 2014
  • 优先权号:   US501833

▎ 摘  要

NOVELTY - The system (10) has a semiconductor substrate (20) with two electrodes (30) where a dielectric layer (40) is arranged. A graphene layer (50) is arraged over the dielectric layer and is electrically isolated from the electrodes. A differential amplifier is operatively connected to the electrodes and is electrically isolated from the graphene layer. The differential amplifier is a complementary metal oxide semiconductor (CMOS) differential amplifier. The dielectric layer is made of polydimethylsiloxane. The radiation-sensitive layer is made of hexagonal boron nitride. USE - Capacitive-based graphene sensor system. ADVANTAGE - The dielectric layer thickness is varied to modify the capacitance of the device to provide better tunability and detection over a broader energy spectrum. The multiple layers of graphene allows for a more precise determination of the energy levels of the incident radiation. The distances are optimized to exceed the distance travelled by the charge carriers without scattering for optimum energy detection. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic side view of a system with the capacitive-Based graphene sensor. Capacitive-based graphene sensor system (10) Semiconductor substrate (20) Electrode (30) Dielectric layer (40) Graphene layer (50)