▎ 摘　　要

NOVELTY - The method involves performing pre-heating process for preheating a substrate before additionally performing plasma-enhanced chemical vapor deposition (PECVD). The PECVD gas containing carbon is supplied. USE - Manufacturing method of non-catalytic substrate growth graphene. ADVANTAGE - The non-catalytic substrate growth graphene is manufactured reliably. DESCRIPTION OF DRAWING(S) - The drawing shows an explanatory view illustrating the manufacturing process of non-catalytic substrate growth graphene. Board layer (100) Carbon-included gas (300) Graphene (500)