• 专利标题:   Method for doping large-range nanoparticle continuously-adjustable graphene in electronic information material and component field, involves depositing layer of tin oxide film on graphene, and performing annealing treatment on structure to obtain doped graphene.
  • 专利号:   CN115295403-A
  • 发明人:   ZHANG W, LI X, HUANG Z, QIAN L
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   C01B032/194, H01L021/04
  • 专利详细信息:   CN115295403-A 04 Nov 2022 H01L-021/04 202305 Chinese
  • 申请详细信息:   CN115295403-A CN10318765 29 Mar 2022
  • 优先权号:   CN10318765

▎ 摘  要

NOVELTY - The method involves depositing a layer of a tin oxide film on graphene by using magnetron sputtering technique, where thickness of the sputtered tin oxide film is about 40 nm. Annealing treatment is performed on a structure to obtain doped graphene. The structure is placed in an annealing furnace under atmosphere of nitrogen, oxygen or air. USE - Method for doping large-range nanoparticle (np) continuously-adjustable graphene in an electronic information material and component field. ADVANTAGE - The method enables utilizing tin oxide with multi-phase characteristics to ensure different doping effect of the relative graphene with metal phase induced strong n-type doping, divalent tin oxide phase induced weak n-type doping and tetravalent tin oxide phase induced strong p-type characteristics for changing oxidation degree by annealing process so as to control proportion of phases and realize continuously-adjustable doping process of the graphene between the strong n-type and the strong p-type to realize large-range continuous regulation and controlling processes in a large range. The method enables avoiding single doping-type processing phenomenon and ensures effective doping control range and effective p-type doping control effect. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a tin oxide film doped with graphene.