▎ 摘　　要

NOVELTY - Thermal plasma flame of high temperature is produced by adding plasma gas. Carbon atom beam in which atomized carbon atoms are transferred to heat plasma flame and flow in high speed is produced by adding air or liquid carbon source material into plasma flame. Beam with decreasing energy of carbon atom beam is stabilized and uniformly produced by making carbon atom beam flow in a long tube adhered to anode. Carbon atom beam is crashed from tube to graphite plate located vertically in specified distance from end of tube. Thus, graphene is produced. USE - Manufacture of graphene. ADVANTAGE - The graphene is easily manufactured high crystallinity and controlled size. DETAILED DESCRIPTION - Thermal plasma flame of high temperature is produced by adding plasma gas. Carbon atom beam in which atomized carbon atoms are transferred to heat plasma flame and flow in high speed is produced by adding air or liquid carbon source material into plasma flame. Beam with decreasing energy of carbon atom beam is stabilized and uniformly produced by making carbon atom beam flow in a long tube adhered to anode. Carbon atom beam is crashed from tube to graphite plate located vertically in specified distance from end of tube. Thus, graphene is produced by thermal plasma chemical gas deposition.