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  • 专利标题:   Manufacture of graphene for e.g. touch screen, involves loading substrate having catalyst layer into chamber, evaporating, supplying carbon source gas, heating in primary portion of catalyst layer, dissolving carbon component, and cooling.
  • 专利号:   WO2012150761-A1, KR2012125155-A, KR1332796-B1
  • 发明人:   JEON S, LEE J, OH S, RAN O S, SEOP L J, U JEON S, JIN S L, SE R O, SEOK W J
  • 专利权人:   KOREA ADV INST SCI TECHNOLOGY, KOREA ADVANCED INST SCI TECHNOLOGY
  • 国际专利分类:   C01B031/02, C23C016/26, C23C016/44, B01J023/755, H01L021/00
  • 专利详细信息:   WO2012150761-A1 08 Nov 2012 C23C-016/44 201276 Pages: 28
  • 申请详细信息:   WO2012150761-A1 WOKR001451 27 Feb 2012
  • 优先权号:   KR041877

▎ 摘　　要

NOVELTY - A substrate having catalyst layer is loaded into the chamber (102) and evaporated, and carbon source gas is supplied in the chamber. The local heating source is heated in the primary portion of catalyst layer, and carbon component is dissolved in the primary portion of catalyst layer. The local heating source is moved and primary portion of catalyst layer is cooled, to obtain graphene. USE - Manufacture of graphene. Uses include but are not limited to touch screen, smart window, flexible organic light-emitting device and solar cell. ADVANTAGE - The graphene is efficiently manufactured with improved deformity, and decreased grain boundary. DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional view of manufacture of graphene. Chamber (102) Substrate support portion (104) Heating wire (122) Driver (124) Vacuum pump (132)