▎ 摘　　要

NOVELTY - The microheater (100) comprises graphene (20) positioned on a substrate (10) and formed in a pattern. A passivation layer (30) is formed on the graphene. The pattern comprises a first pattern configured to supply electric power to the graphene and a second pattern configured to focus heat in the graphene. The passivation layer has a flat surface, has a surface roughness of less than 0.4 nm and a thickness corresponding to one atom, and comprises a material containing no dangling bonds. The passivation layer has higher thermal conductivity than the air. USE - Microheater applied to electronic device such as carbon nanotube transistor or low temperature polycrystalline silicon or thin-film transistor. ADVANTAGE - The degradation of the performance of graphene is prevented, as the passivation layer is present on the graphene having the pattern formed The heat generated in the graphene is emitted more rapidly, which leads to improved durability to deterioration of the graphene. The microheater generates heat having a uniform circular temperature distribution, and thus easily controls uniform heat transfer to an object to be heated. The microheater is manufactured in a simpler manner since the manufacturing process is performed under low-temperature and normal-pressure conditions. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method of manufacturing a microheater. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the example of the microheater. Substrate (10) Graphene (20) Passivation layer (30) Microheater (100)