• 专利标题:   Graphite based uncooled infrared detection focal plane device, has infrared detection element formed with three-dimensional graphene wall that is grown in situ on substrate, which is made of heat sensitive thin film material.
  • 专利号:   CN106248221-A
  • 发明人:   FENG S, WEI X, SHEN J, YANG J, LU S, ZHOU D, SHI H, DU C
  • 专利权人:   CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   G01J005/10
  • 专利详细信息:   CN106248221-A 21 Dec 2016 G01J-005/10 201706 Pages: 7 Chinese
  • 申请详细信息:   CN106248221-A CN10567749 19 Jul 2016
  • 优先权号:   CN10567749

▎ 摘  要

NOVELTY - The device has a substrate formed with a periodic array of infrared detection elements. The infrared detection element is formed with a three-dimensional graphene wall that is grown in situ on the substrate. The substrate is made of heat sensitive thin film material i.e. silicon nitride, amorphous silicon, amorphous silicon-germanium alloy or vanadium oxide. The substrate is provided with a ROIC integrated circuit. USE - Graphite based uncooled infrared detection focal plane device. ADVANTAGE - The device improves detection efficiency. The device avoids requirements of anti-reflection film, thus simplifying the device structure to a certain degree and reduces the device cost. The device is completely compatible with an existing uncooled infrared detection focal plane device manufacturing process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of graphite based uncooled infrared detection focal plane device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphite based uncooled infrared detection focal plane device.