▎ 摘 要
NOVELTY - The device has a substrate formed with a periodic array of infrared detection elements. The infrared detection element is formed with a three-dimensional graphene wall that is grown in situ on the substrate. The substrate is made of heat sensitive thin film material i.e. silicon nitride, amorphous silicon, amorphous silicon-germanium alloy or vanadium oxide. The substrate is provided with a ROIC integrated circuit. USE - Graphite based uncooled infrared detection focal plane device. ADVANTAGE - The device improves detection efficiency. The device avoids requirements of anti-reflection film, thus simplifying the device structure to a certain degree and reduces the device cost. The device is completely compatible with an existing uncooled infrared detection focal plane device manufacturing process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of graphite based uncooled infrared detection focal plane device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphite based uncooled infrared detection focal plane device.