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  • 专利标题:   Method for manufacturing torsion bilayer graphene-based photodetector, involves coating torsion bilayer graphene photosensitive material, etching on reverse bilayer graphene, making electrode followed by vapor deposition on electrode.
  • 专利号:   CN104659152-A, CN104659152-B
  • 发明人:   LIU Z, PENG H, WANG H, YIN J
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   H01L021/02, H01L031/0392, H01L031/18
  • 专利详细信息:   CN104659152-A 27 May 2015 H01L-031/18 201561 Pages: 15 Chinese
  • 申请详细信息:   CN104659152-A CN10078677 13 Feb 2015
  • 优先权号:   CN10078677

▎ 摘　　要

NOVELTY - A torsion bilayer graphene-based photodetector manufacturing method involves coating torsion bilayer graphene photosensitive material, and etching on the reverse bilayer graphene, and developing, fixing, making electrode pattern followed by carrying out vapor deposition on the processed reverse bilayer graphene metal electrode to obtain finished product. USE - Method for manufacturing torsion bilayer graphene-based photodetector. ADVANTAGE - The photodetector has high mobility, specific wavelength with high efficiency photoelectric detection efficiency, enhanced photoresponse average, without bias pressure supply and additional energy. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing torsion bilayer graphene.