▎ 摘　　要

NOVELTY - The device (10) has a chamber (110) that includes the evaporation space and annealing space. The carbon is arranged in a side portion. A processed substrate in which amorphous carbon is faced is deposited in amorphous carbon. An overlay control unit which is arranged between target and processed board controls several deposited amorphous carbon in processed substrate. A heating portion (170) anneals the processed substrate in which amorphous carbon is deposited. USE - Graphene manufacturing device. ADVANTAGE - The overlay control unit is arranged between target and processed board, such that the amorphous carbon is deposited on processed substrate evenly. The quality of graphene can be uniformly controlled. The production efficiency of graphene can be improved efficiently by progressing deposition process and annealing process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for graphene manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the Graphene manufacturing device. Graphene manufacturing device (1) Chamber (110) Target (130) Heating portion (170)