• 专利标题:   Flexible deformation pressure sensor for intelligent touch device, has pressure-sensitive layer that comprises laser-induced graphene with regular polygon with distance, and electrode layer that comprises electrode formed on substrate material.
  • 专利号:   CN115096482-A
  • 发明人:   ZHANG Y, HAN L, WANG S
  • 专利权人:   UNIV SHANDONG
  • 国际专利分类:   B81C003/00, G01L001/22, G01L009/04
  • 专利详细信息:   CN115096482-A 23 Sep 2022 G01L-001/22 202299 Chinese
  • 申请详细信息:   CN115096482-A CN10730022 24 Jun 2022
  • 优先权号:   CN10730022

▎ 摘  要

NOVELTY - The flexible deformation pressure sensor has a first flexible material layer (1) and a pressure-sensitive layer (2), an electrode layer (3) and a second flexible material layer (4) laminated from bottom to top. The first flexible material layer and the second flexible material layer respectively comprise a flexible material. The pressure-sensitive layer comprises a laser-induced graphene with a regular polygon with a distance. The electrode layer comprises an electrode formed on a substrate material. A flexible material is a material including polydimethylsiloxane (PDMS) and thermoplastic polyurethane (TPU), preferably dimethyl silicone polymer PDMS. The electrode layer is a layer of different materials including Titanium-gold, chrromium-gold and laser induced graphene. USE - Flexible deformation pressure sensor for use in intelligent touch device, surgical sensing tool, biosensor and other research field for measuring dynamic pressure such as pulse or vibration. ADVANTAGE - The pressure sensor includes improved sensing sensitivity, and simplifies the preparation process and period, and optimizes the preparation parameter, so as to realize the optimal sensor performance, and is a preferred method for preparing pressure sensor on a large scale. The resistance change of the pressure sensitive layer is benefited from hexagonal close array interval change and laser induced graphene self-deformation, which greatly improves the sensing sensitivity. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of flexible deformation pressure sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a flexible deformation pressure sensor. 1First flexible material layer 2Pressure-sensitive layer 3Electrode layer 4Second flexible material layer