• 专利标题:   Doped graphene preparing method, involves forming nickel thin film layer on copper substrate, and N-type graphene and P-type doped graphene formed respectively on N-type doped element-rich area and P-type doped element-rich zone.
  • 专利号:   CN105655242-A, CN105655242-B
  • 发明人:   DI Z, CHEN D, DING G, GUO Q, MA J, WANG G, XIE X, XUE Z, ZHANG M, ZHENG X, DAI J
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION, SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   H01L021/04
  • 专利详细信息:   CN105655242-A 08 Jun 2016 H01L-021/04 201645 Pages: 14 Chinese
  • 申请详细信息:   CN105655242-A CN10675336 21 Nov 2014
  • 优先权号:   CN10675336

▎ 摘  要

NOVELTY - The method involves forming a nickel thin film layer on a copper substrate. An N-type doped element and a P-type doped element are arranged on the nickel thin film layer. An N-type doped element-rich area and a P type doped element-rich area are formed. A heat preservation process is performed at methane environment. An N-type graphene and P-type doped graphene are formed respectively on the N-type doped element-rich area and the P-type doped element-rich zone. The P-type doped element is boron or sulfur. The N-type doped element is nitrogen and phosphorus or arsenic. USE - Doped graphene preparing method. ADVANTAGE - The method enables realizing better copper and nickel property and stable doped graphene structure. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene PN junction device preparation method. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a doped graphene preparing method. '(Drawing includes non-English language text)'