• 专利标题:   Method for fabricating field effect transistor, involves filling slit with potential barrier material is provided to induce Fowler-Nordheim tunneling through graphene channel layer when gate voltage is applied to gate electrode.
  • 专利号:   US2015228804-A1, US9166062-B2
  • 发明人:   LEE J, PARK S, BYUN K, SEO D, SONG H, SHIN H, CHUNG H, HEO J
  • 专利权人:   UNIV SEOUL NAT R DB FOUND, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L029/16, H01L029/66, H01L029/786, H01L021/36
  • 专利详细信息:   US2015228804-A1 13 Aug 2015 H01L-029/786 201557 Pages: 17 English
  • 申请详细信息:   US2015228804-A1 US693680 22 Apr 2015
  • 优先权号:   KR077368

▎ 摘  要

NOVELTY - The method involves forming a slit (235) in the graphene channel layer (230) on a substrate (210). The source electrode (271) and the drain electrode (272) are configured to apply voltages to the graphene channel layer. A gate electrode (273) is formed on the graphene channel layer. A gate insulation layer (250) is formed between the graphene channel layer and gate electrode. The slit is filled with a potential barrier material configured to induce Fowler-Nordheim (F-N) tunneling through the graphene channel layer when a gate voltage is applied to the gate electrode. USE - Method for fabricating field effect transistor. ADVANTAGE - The high-performance field effect transistors which include graphene as channel layers and is capable of having a high ON/OFF ratio of operation currents. The ON/OFF ratios of operation currents of the field effect transistors are increased. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a field effect transistor including a graphene channel layer. Substrate (210) Graphene channel layer (230) Slit (235) Gate insulation layer (250) Source electrode (271) Drain electrode (272) Gate electrode (273)