▎ 摘　　要

NOVELTY - The method involves preparing a sample having graphene on a transparent substrate. The sample is overlaid with a liquid medium. The sample is imaged using interference reflection microscopy. The sample is prepared by transferring the layers of graphene to a transparent substrate using a wet-transfer process with polymethyl methacrylate protection. The sample is prepared by transferring the layers of graphene to a transparent substrate using a dry-transfer process using thermal release tape. USE - Method for the direct optical visualization of graphene and the nanoscale defects. ADVANTAGE - The real-time inspection of nanoscale defects is readily achieved over large areas. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a measurement system.