• 专利标题:   Forming cleaned nanotube-graphene hybrid thin film on a substrate, comprises depositing the nanotube thin-film over a substrate to produce a layer of nanotube thin-film, and removing impurities from surface of layer of nanotube thin-film.
  • 专利号:   DE102012220314-A1, GB2496956-A, US2013130037-A1, GB2496956-B, DE102012220314-B4, US9177688-B2, US2015340617-A1, US2015348667-A1, US2015349264-A1, US9887361-B2, US9954175-B2
  • 发明人:   BOL A A, CHANDRA B, KASRY A, MAAROUF A, MARTYNA G J, TULEVSKI G S
  • 专利权人:   INT BUSINESS MACHINES CORP, INT BUSINESS MACHINES CORP, INT BUSINESS MACHINES CORP, EGYPT NANOTECHNOLOGY CENT, BOL A A, CHANDRA B, KASRY A, MAAROUF A, MARTYNA G J, TULEVSKI G S, BOL A A, CHANDRA B, KASRY A, MAAROUF A, MARTYNA G J, TULEVSKI G S, INT BUSINESS MACHINES CORP
  • 国际专利分类:   B82B003/00, C01B031/04, C23C016/26, C30B025/18, H01L021/18, H01L021/28, H01L021/336, H01L029/775, H01L029/78, H01B001/04, H01L021/02, H01L029/10, H01L029/66, H01L029/786, H01L031/0224, H01L033/42, H01L051/00, H01L051/05, B05D001/02, B05D003/02, B05D005/12, B32B009/04, B82Y030/00, B82Y040/00, C23F001/02, B32B009/00, B82Y010/00, C01B031/02, H01L029/06, H01L029/16, H01L029/778, H01L051/10, C01B032/158, C01B032/182, C01B032/186, C01B032/192, C23C016/02
  • 专利详细信息:   DE102012220314-A1 23 May 2013 H01L-021/18 201338 Pages: 20 German
  • 申请详细信息:   DE102012220314-A1 DE10220314 08 Nov 2012
  • 优先权号:   US301943, US820011, US820028, US820039

▎ 摘  要

NOVELTY - The method comprises: depositing a nanotube thin-film over a substrate to produce a layer of nanotube thin-film; removing impurities from a surface of the layer of nanotube thin-film not contacting the substrate to produce a cleaned layer of nanotube thin-film; depositing a layer of graphene over the cleaned layer of nanotube thin-film to produce a nanotube-graphene hybrid thin-film; and removing impurities from a surface of the nanotube-graphene hybrid thin-film to produce a cleaned nanotube-graphene hybrid thin-film using an acid, solvent and water cleaning technique. USE - The method is useful for forming a cleaned nanotube-graphene hybrid thin film on a substrate (all claimed). ADVANTAGE - The method ensures effective and economical formation of the cleaned nanotube-graphene hybrid thin film on the substrate with high performance. DETAILED DESCRIPTION - The method comprises: depositing a nanotube thin-film over a substrate to produce a layer of nanotube thin-film; removing impurities from a surface of the layer of nanotube thin-film not contacting the substrate to produce a cleaned layer of nanotube thin-film; depositing a layer of graphene over the cleaned layer of nanotube thin-film to produce a nanotube-graphene hybrid thin-film; and removing impurities from a surface of the nanotube-graphene hybrid thin-film to produce a cleaned nanotube-graphene hybrid thin-film using an acid, solvent and water cleaning technique, where the hybrid thin-film has improved electrical performance via decreasing nanotube resistance by increasing contact area through use of graphene as a bridge. The method further comprises: chemically doping the cleaned nanotube-graphene hybrid thin-film to increase the conductivity; repeating the step of depositing the nanotube thin-film over a substrate to produce a layer of nanotube thin-film to form a hybrid thin-film with a desired transparency; depositing (1602) the nanotube thin film over a metal foil to produce a layer of nanotube thin-film; placing (1604) the metal foil with the deposited nanotube film in a chemical vapor deposition furnace to grow the graphene on the nanotube film to form the nanotube-graphene hybrid thin-film; and transferring (1606) the nanotube-graphene hybrid thin-film over a substrate. The layer of nanotube thin-film comprises a layer of carbon nanotube, and/or a network of single wall carbon nanotubes. The step of depositing the nanotube thin-film over a substrate to produce a layer of nanotube film comprises performing a vacuum filtration process, performing a spray deposition of the nanotube film over the substrate, dropping a nanotube solution onto the substrate, performing a chemical vapor deposition growth process, and/or performing a water-surfactant solution based nanotube deposition process. The step of removing impurities from the surface of the layer of nanotube film and the surface of the nanotube-graphene hybrid thin-film comprises annealing the layer of nanotube thin-film under reduced pressure to remove any dried solvent. The step of depositing a layer of graphene over the cleaned layer of nanotube film to produce a nanotube-graphene hybrid thin-film comprises transferring chemical vapor deposition grown graphene, and spraying graphene oxide flakes suspended in a solvent and reducing the flakes to graphene flakes through liquid or gas phase reducing agents. The step of depositing the nanotube thin-film over a metal foil to produce a layer of nanotube film comprises forming a self assembled monolayer of an amine terminated group over a copper foil and depositing a nanotube film from an aqueous solution; depositing the nanotube thin-film over copper foil from an organic solvent; and spraying a nanotube thin-film solution on the metal foil and allowing the solution to dry. The step of placing the metal foil with the deposited nanotube film in a chemical vapor deposition furnace to grow graphene comprises saturating copper atoms with a carbon gas at a temperature that causes formation of graphene. INDEPENDENT CLAIMS are included for: (1) a nanotube-graphene hybrid film; and (2) a FET. DESCRIPTION OF DRAWING(S) - The diagram shows a flow chart of a method for forming a cleaned nanotube-graphene hybrid thin film on a substrate (Drawing includes non-English language text). Depositing the nanotube thin-film over a metal foil to produce a layer of nanotube thin-film (1602) Placing the metal foil with the deposited nanotube thin-film in a chemical vapor deposition furnace to grow graphene on the nanotube thin-film to form a nanotube-graphene hybrid film (1604) Transferring the nanotube-graphene hybrid thin-film over a substrate. (1606)