▎ 摘 要
NOVELTY - The method comprises: depositing a nanotube thin-film over a substrate to produce a layer of nanotube thin-film; removing impurities from a surface of the layer of nanotube thin-film not contacting the substrate to produce a cleaned layer of nanotube thin-film; depositing a layer of graphene over the cleaned layer of nanotube thin-film to produce a nanotube-graphene hybrid thin-film; and removing impurities from a surface of the nanotube-graphene hybrid thin-film to produce a cleaned nanotube-graphene hybrid thin-film using an acid, solvent and water cleaning technique. USE - The method is useful for forming a cleaned nanotube-graphene hybrid thin film on a substrate (all claimed). ADVANTAGE - The method ensures effective and economical formation of the cleaned nanotube-graphene hybrid thin film on the substrate with high performance. DETAILED DESCRIPTION - The method comprises: depositing a nanotube thin-film over a substrate to produce a layer of nanotube thin-film; removing impurities from a surface of the layer of nanotube thin-film not contacting the substrate to produce a cleaned layer of nanotube thin-film; depositing a layer of graphene over the cleaned layer of nanotube thin-film to produce a nanotube-graphene hybrid thin-film; and removing impurities from a surface of the nanotube-graphene hybrid thin-film to produce a cleaned nanotube-graphene hybrid thin-film using an acid, solvent and water cleaning technique, where the hybrid thin-film has improved electrical performance via decreasing nanotube resistance by increasing contact area through use of graphene as a bridge. The method further comprises: chemically doping the cleaned nanotube-graphene hybrid thin-film to increase the conductivity; repeating the step of depositing the nanotube thin-film over a substrate to produce a layer of nanotube thin-film to form a hybrid thin-film with a desired transparency; depositing (1602) the nanotube thin film over a metal foil to produce a layer of nanotube thin-film; placing (1604) the metal foil with the deposited nanotube film in a chemical vapor deposition furnace to grow the graphene on the nanotube film to form the nanotube-graphene hybrid thin-film; and transferring (1606) the nanotube-graphene hybrid thin-film over a substrate. The layer of nanotube thin-film comprises a layer of carbon nanotube, and/or a network of single wall carbon nanotubes. The step of depositing the nanotube thin-film over a substrate to produce a layer of nanotube film comprises performing a vacuum filtration process, performing a spray deposition of the nanotube film over the substrate, dropping a nanotube solution onto the substrate, performing a chemical vapor deposition growth process, and/or performing a water-surfactant solution based nanotube deposition process. The step of removing impurities from the surface of the layer of nanotube film and the surface of the nanotube-graphene hybrid thin-film comprises annealing the layer of nanotube thin-film under reduced pressure to remove any dried solvent. The step of depositing a layer of graphene over the cleaned layer of nanotube film to produce a nanotube-graphene hybrid thin-film comprises transferring chemical vapor deposition grown graphene, and spraying graphene oxide flakes suspended in a solvent and reducing the flakes to graphene flakes through liquid or gas phase reducing agents. The step of depositing the nanotube thin-film over a metal foil to produce a layer of nanotube film comprises forming a self assembled monolayer of an amine terminated group over a copper foil and depositing a nanotube film from an aqueous solution; depositing the nanotube thin-film over copper foil from an organic solvent; and spraying a nanotube thin-film solution on the metal foil and allowing the solution to dry. The step of placing the metal foil with the deposited nanotube film in a chemical vapor deposition furnace to grow graphene comprises saturating copper atoms with a carbon gas at a temperature that causes formation of graphene. INDEPENDENT CLAIMS are included for: (1) a nanotube-graphene hybrid film; and (2) a FET. DESCRIPTION OF DRAWING(S) - The diagram shows a flow chart of a method for forming a cleaned nanotube-graphene hybrid thin film on a substrate (Drawing includes non-English language text). Depositing the nanotube thin-film over a metal foil to produce a layer of nanotube thin-film (1602) Placing the metal foil with the deposited nanotube thin-film in a chemical vapor deposition furnace to grow graphene on the nanotube thin-film to form a nanotube-graphene hybrid film (1604) Transferring the nanotube-graphene hybrid thin-film over a substrate. (1606)