▎ 摘　　要

NOVELTY - The method involves providing a supporting substrate (102). An oxide layer is formed over the supporting substrate. A metal layer is formed over the oxide layer. A graphene layer is formed over the metal layer. A portion of the supporting substrate and the oxide layer is removed. A silicon carbide (SiC) layer is formed over the graphene layer. A diamond layer is formed over the graphene layer. A pellicle frame is attached to a peripheral portion of the supporting substrate. USE - Method for manufacturing a pellicle. ADVANTAGE - The method enables performing manufacturing process at sub-atmospheric pressures to reduce unwanted gas phase interactions and improve uniformity of a film across the support substrate. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a pellicle. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a pellicle fabricated at various stages. Supporting substrate (102)