• 专利标题:   Patterning graphene on substrate by depositing graphene film on patterned metal template, and transferring the patterned graphene film onto substrate.
  • 专利号:   CN106148909-A
  • 发明人:   GUAN Y, TANG B
  • 专利权人:   NANCHANG OFILM TECHNOLOGY CO LTD, NANCHANG OUFEI OPTICAL TECHNOLOGY CO LTD, SUZHOU O FILM TECH CO LTD, SHENZHEN OFILM TECH CO LTD
  • 国际专利分类:   C23C016/04, C23C016/26
  • 专利详细信息:   CN106148909-A 23 Nov 2016 C23C-016/26 201717 Pages: 8 Chinese
  • 申请详细信息:   CN106148909-A CN10151533 01 Apr 2015
  • 优先权号:   CN10151533

▎ 摘  要

NOVELTY - Graphene is patterned on substrate by depositing graphene film on patterned metal template (2), and then transferring the patterned graphene film onto substrate to obtain the substrate having patterned graphene film. USE - Method for patterning graphene on substrate (claimed). ADVANTAGE - The method does not need masking template for etching graphene film. It only needs deposition of graphene film on patterned metal template, and then transferring of graphene film onto the substrate to obtain patterned graphene on substrate, thus achieving low cost and high production efficiency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a template used in patterning graphene on substrate, comprising metal template substrate (1) and patterned metal template (2), which are sequentially arranged from bottom to top. DESCRIPTION OF DRAWING(S) - The drawing is a schematic diagram illustrating the template employed in patterning graphene on substrate. Metal template substrate (1) Patterned metal template (2)