• 专利标题:   Carbon-based nanometer material transistor preparing method, involves leading electrodes at two ends of carbon nanometer tube, and depositing conductive material at two ends of graphene for forming electrode.
  • 专利号:   CN102354668-A, CN102354668-B
  • 发明人:   CAO Y, CUI X, ZHANG X, HUANG R, FU Y, ZHAO H, WEI Q, WEI Z, YIN J
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   B82Y040/00, H01L021/336
  • 专利详细信息:   CN102354668-A 15 Feb 2012 H01L-021/336 201217 Pages: 8 Chinese
  • 申请详细信息:   CN102354668-A CN10308483 12 Oct 2011
  • 优先权号:   CN10308483

▎ 摘  要

NOVELTY - The method involves arranging a metal carbon nanometer tube and a semi-conductive carbon nanometer tube on a substrate, where the substrate is made of silicon/silicon dioxide, quartz, gallium arsenide or plastic material. A medium material layer is deposited on the carbon nanometer tube. Graphene is transferred to the carbon nanometer tube. Electrodes are led at two ends of the carbon nanometer tube by using conductive material. The conductive material is deposited at two ends of the graphene for forming an electrode. USE - Carbon-based nanometer material transistor preparing method. ADVANTAGE - The method enables preparing a carbon-based nanometer material transistor with two types of structure, and enables the semi-conductive carbon nanometer tube to be utilized as a channel when the graphene is utilized as a gate electrode and the metal carbon nanometer tube is utilized as the gate electrode if the graphene is utilized as the channel. DESCRIPTION OF DRAWING(S) - The drawing shows a photographic view of a carbon-based nanometer material transistor.