• 专利标题:   Multilayer structure for electronic device has diffusion barrier layer between first material layer and second material layer, that includes non-graphene-based two-dimensional (2D) material.
  • 专利号:   EP3125291-A1, US2017033003-A1, KR2017014870-A, CN106410002-A, US10134628-B2
  • 发明人:   SONG H, NAM S, PARK S, SHIN K, SHIN H, LEE J, LEE C, CHO Y, SONG H J, NAM S G, PARK S J, SHIN K W, SHIN H J, LEE J H, LEE C S, CHO Y C, NA S, ZHAO L
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   H01L021/768, H01L023/485, H01L023/532, H01L021/285, H01L029/45, H01L021/02, H01L033/14
  • 专利详细信息:   EP3125291-A1 01 Feb 2017 H01L-023/532 201712 Pages: 41 English
  • 申请详细信息:   EP3125291-A1 EP176425 27 Jun 2016
  • 优先权号:   KR108864

▎ 摘  要

NOVELTY - The multilayer structure (M100) has a first material layer (L10), a second material layer (L20) connected to the first material layer, the second material layer being spaced apart from the first material layer, and a diffusion barrier layer (B10) between the first material layer and the second material layer. The diffusion barrier layer includes a non-graphene-based 2D material. The 2D material includes a metal chalcogenide-based material having the 2D crystal structure. USE - Multilayer structure for electronic device (claimed) such as integrated circuits (ICs). ADVANTAGE - The diffusion barrier layers including the material may have a small thicknesses and maintain excellent characteristics while having a small thicknesses i.e., may serve to increase stability, reliability, and durability of the device without increasing a resistance of the high-integration device (ultra-high-integration device). High-integration device having excellent characteristics may be easily implemented by using the diffusion barrier layers. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for an electronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a multilayer structure including a diffusion barrier layer. Diffusion barrier layer (B10) First material layer (L10) Second material layer (L20) Multilayer structure (M100)