• 专利标题:   FET integrated heterogeneous material graphite nano-gate structure, has FET provided with source region and drain region that are made of intrinsic semiconductor graphene nanometer belt.
  • 专利号:   CN103258858-A
  • 发明人:   YANG X, WANG W, XIA C, XIAO G
  • 专利权人:   UNIV NANJING POSTS TELECOM
  • 国际专利分类:   B82Y010/00, H01L029/49, H01L029/786
  • 专利详细信息:   CN103258858-A 21 Aug 2013 H01L-029/786 201376 Pages: 7 Chinese
  • 申请详细信息:   CN103258858-A CN10141602 22 Apr 2013
  • 优先权号:   CN10141602

▎ 摘  要

NOVELTY - The structure has a FET provided with a conductive channel (1), a source region (2), a drain region (3) and a gate oxide layer (4), where the conduction channel, the source region and the drain region are made of intrinsic semiconductor graphene nanometer belt. A source electrode (S) and drain (D) are provided with a conductive metal. USE - FET integrated heterogeneous material graphite nano-gate structure. ADVANTAGE - The structure improves performance, and reduces leakage of current, and inhibits drain induced barrier effect. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a FET integrated heterogeneous material graphite nano-gate structure. Drain (D) Source electrode (S) Conductive channel (1) Source region (2) Drain region (3) Gate oxide layer (4)