• 专利标题:   Self-driven pressure strain sensor used in electronic skin, has transistor layer which includes piezoelectric nanogenerator, and cover layer which is configured to cover transistor layer and to cover channel with graphene layer.
  • 专利号:   CN110854263-A
  • 发明人:   SUN Q, MENG Y, CAO Z
  • 专利权人:   BEIJING NANOENERGY NANOSYSTEMS INST
  • 国际专利分类:   H01L041/113, H01L041/22, H01L041/25
  • 专利详细信息:   CN110854263-A 28 Feb 2020 H01L-041/113 202023 Pages: 16 Chinese
  • 申请详细信息:   CN110854263-A CN10874695 02 Aug 2018
  • 优先权号:   CN10874695

▎ 摘  要

NOVELTY - The self-driven pressure strain sensor has a transistor layer (100) is provided with substrate (101). A common gate layer (1023), source electrode (1022), and drain electrode (1021) are formed on the substrate. The source and drain are connected through a channel. The gate is connected to the channel through an ionic gel layer (103). The transistor layer includes a piezoelectric nanogenerator (104). One of the electrodes of the piezoelectric nano-generator is the grid. The cover layer (200) includes a graphene layer (201). The cover layer is configured to cover the transistor layer and to cover the channel with the graphene layer. USE - Self-driven pressure strain sensor used in electronic skin (claimed). ADVANTAGE - The strain sensor is localized and systematic. The pressure sensing and strain sensing are integrated, and both can be monitored in real time, thus, saving resources. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing self-driven pressure strain sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a top view of the self-driven pressure strain sensor. (Drawing includes non-English language text) Transistor layer (100) Substrate (101) Ionic gel layer (103) Piezoelectric nanogenerator (104) Cover layer (200) Graphene layer (201) Drain electrode (1021) Source electrode (1022) Common gate layer (1023)