▎ 摘 要
NOVELTY - A graphene structure (1) is manufactured by forming carbon by decomposition reaction of carbon compound on base material (2), forming insulation film layer (3) on base material, forming catalyst metal layer (4) on insulation film layer, supplying catalyst metal layer, forming graphite layer (5), dissolving graphite with active substance in catalyst metal, spreading and precipitating to interface with insulating film by heat-processing, and forming a uniform graphene film on insulating film by removing catalyst metal layer. USE - Manufacture of graphene structure used for electronic devices, such as field effect transistor (FET) of high mobility. ADVANTAGE - Graphene structure which has uniform graphene film on insulating film is manufactured simply. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the manufacturing process of graphene structure and graphene film. (Drawing includes non-English language text). Graphene structure (1) Base material (2) Insulation film layer (3) Catalyst metal layer (4) Graphite layer (5) Graphene layer (6)