• 专利标题:   Electronic device e.g. graphene based electronic device, such as field-effect transistor (FET) has local first and second gates which form gates to locally control first portion of bilayer graphene layer.
  • 专利号:   US2013001519-A1, US9082856-B2
  • 发明人:   CHEN Z, FRANKLIN A D, HAN S
  • 专利权人:   INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L029/66, H01L029/16, H01L029/49, H01L029/786
  • 专利详细信息:   US2013001519-A1 03 Jan 2013 H01L-029/66 201306 Pages: 14 English
  • 申请详细信息:   US2013001519-A1 US613198 13 Sep 2012
  • 优先权号:   US986342, US613198

▎ 摘  要

NOVELTY - The electronic device (100) has a substrate (105) and an insulator (110) overlaying the substrate. A local first gate (115) is embedded in the insulator with a top surface of the local first gate being substantially coplanar with a surface of the insulator. A second dielectric layer (135) is formed over a bilayer graphene layer (130) that is formed on a first dielectric layer (120) over the local first gate. A local second gate (140) is formed over the second dielectric layer. The local first and second gates form gates to locally control a first portion of the bilayer graphene layer. USE - Electronic device e.g. graphene based electronic device, such as FET. ADVANTAGE - Provides techniques for forming bilayer graphene layer device utilizing the advantageous properties of graphene, that includes a patterned top and bottom gates to bias different voltages on different devices on the same wafer to different band gap or threshold voltage depending on the device and/or circuit requirement. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for an integrated circuit. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of an electronic device. Electronic device (100) Substrate (105) Insulator (110) Local first gate (115) First dielectric layer (120) Bilayer graphene layer (130) Second dielectric layer (135) A local second gate (140)