▎ 摘 要
NOVELTY - The chamber (1000) has a chamber box fixed with a substrate that comprises a metal film. A gas supplier supplies a carbon gas into an inner space of the chamber box. A main heater emits a light to the inner space to heat a substrate. The main heater comprises a first main heater and a second main heater. An auxiliary heater absorbs the light that is emitted by the main heater. The auxiliary heater comprises the first auxiliary heater and the second auxiliary heater. The first auxiliary heater and the second auxiliary heater are spaced from each other and define an auxiliary space. The substrate is placed in the auxiliary space. The first auxiliary heater is arranged between the first main heater and the substrate. The second auxiliary heater is arranged between the second main heater and the substrate. USE - Graphene synthesis chamber. ADVANTAGE - The chamber can increase temperature to reduce loss of radiant energy and heating time and improve graphene synthesis efficiency. The gas supply unit is fixed with an extension portion that extends toward the auxiliary space to efficiently supply gas towards the auxiliary space without the extension portion in a convenient manner. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of a graphene synthesis chamber. Chamber (1000) Gas discharge unit (1130) Lamps (1141) Windows (1142) Auxiliary heating units (1145)