▎ 摘 要
NOVELTY - The method involves bonding (110) a wafer with a graphene layer. The graphene layer is formed with a patterned polydimethylsiloxane stamp mold. The adhered wafer and the polydimethylsiloxane stamp mold are separated (120). The separated polydimethylsiloxane stamp mold is attached to a piezo substrate to form a pattern on the piezo substrate. USE - Method for manufacturing a saw filter by applying soft lithography patterning using CVD graphene. ADVANTAGE - The method enables simplify manufacturing a saw filter by forming a high resolution pattern. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating a method for manufacturing a saw filter by applying soft lithography patterning using CVD graphene. '(Drawing includes non-English language text)' Step for bonding wafer with graphene layer (110) Step for separating adhered wafer and polydimethylsiloxane stamp mold (120)