▎ 摘　　要

NOVELTY - The beam profile monitor comprises a conductive probe (10A) which is used for measuring a beam profile of a charged particle beam by a characteristic when irradiated to charged particle beam by stretching in a direction crossing the advancing direction of the charged particle beam. The probe is comprised of highly oriented graphite having a mosaic spread value of 10 degrees or less. The advancing direction is defined as the in-plane direction of the graphene sheet constituting the highly oriented graphite. The drawing direction of the probe is defined as the in plane direction of the graphene sheet constituting the highly oriented graphite. USE - Beam profile monitor for measuring beam profile of charged particle beams emitted from accelerators e.g. linear accelerator (LINAC) used for various physical experiments and medications. ADVANTAGE - The beam profile of the charged particle beam is measured stably, even if the thermal load of the probe by the interaction with the beam is large. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic diagram of the beam profile monitor. (Drawing includes non-English language text) Conductive probe (10A) Duct (20) Collimator (30, 50) Radio frequency deflector electrode (40) Electron detector (60)