▎ 摘　　要

NOVELTY - Preparation of graphene and carbon nanotube composite material involves plating mono-crystalline silicon substrate surface with titanium transition layer and cobalt catalyst layer; vacuumizing reaction chamber at 10 Pa with argon gas at flowrate of 30 sccm to keep reaction chamber pressure at 200 Pa; heating at 800 degrees C for 40 minutes; introducing carbon source gas and protective gas at flowrate of 70 sccm and 15 sccm to stabilize reaction chamber pressure at 800-1000 Pa; adjusting sputtering power at 200 W; depositing for 36 minutes; and cooling under protection of argon gas. USE - Preparation of graphene and carbon nanotube composite material. ADVANTAGE - The method has simple operation, appropriate growth rate, can excellently deposits sample in substrate at low temperature, and produces composite material with excellent field emission performance. DETAILED DESCRIPTION - Preparation of graphene and carbon nanotube composite material comprises plating mono-crystalline silicon substrate surface with titanium transition layer and cobalt catalyst layer in magnetic control sputtering device; vacuumizing reaction chamber at 10 Pa with argon gas at flowrate of 30 sccm to keep reaction chamber pressure at 200 Pa; heating at 800 degrees C for 40 minutes; stabilizing reaction chamber temperature at 800 degrees C; introducing carbon source gas and protective gas at flowrate of 70 sccm and 15 sccm, respectively to stabilize reaction chamber pressure at 800-1000 Pa, in which carbon source gas is hydrocarbon compound; opening radio frequency power supply to adjust sputtering power at 200 W for 36 minutes; closing radio frequency power supply, power supply and carbon source gas; and cooling under protection of argon gas to obtain graphene and carbon nanotube composite material.