▎ 摘　　要

NOVELTY - Vacuum processing apparatus 1A comprises decompressable process container, supply port that is formed on a side wall of the process container and configured to supply, to the process container. The apparatus also comprises an ionic liquid that absorbs an oxidizing gas, and a discharge port configured to discharge the ionic liquid supplied to the process container. The ionic liquid is supplied from the supply port to an inner wall of the process container. USE - Vacuum processing apparatus for removing oxidizing gas. ADVANTAGE - The vacuum processing apparatus enables removal of an oxidizing gas remaining in a process container. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for removing an oxidizing gas, which involves suppling an ionic liquid that absorbs an oxidizing gas from a supply port formed on a side wall of a decompressable process container to the process container, and absorbing the oxidizing gas remaining in the process container by the ionic liquid; and discharging the ionic liquid supplied to the process container. DESCRIPTION OF DRAWING(S) - The drawing shows schematic view of a vacuum processing apparatus. 1AVacuum processing apparatus 10Apparatus body 11Controller 101Chamber 104Gas supply mechanism